| 000 | 00716nam 22002413 4500 | ||
|---|---|---|---|
| 001 | 61475 | ||
| 010 | _a978-1-4200-5516-0 | ||
| 090 | _a61475 | ||
| 100 | _a20130715d2012 k||y0pory50 ba | ||
| 101 | _aeng | ||
| 102 | _aUS | ||
| 200 |
_aFundamentals of microfabrication and nanotechnology _efrom MEMS to bio-MEMS _emanufacturing techniques and applications _fMarc J. Madou |
||
| 205 | _a3rd ed | ||
| 210 |
_aBoca Raton _aLondon _aNew York _cCRC _dcop. 2012 |
||
| 215 |
_aXIII, 632 p. _cil. _d29 cm |
||
| 310 | _aAdquirido CENIMAT | ||
| 310 | _aProjecto ERC | ||
| 606 | _aSistemas microeletromecânicos | ||
| 680 | _aTK 7875 | ||
| 700 |
_aMadou _bMarc J. |
||
| 801 |
_aPT _gRPC |
||
| 942 |
_2lcc _cC _n0 |
||