000 00949nam a2200277 4500
001 29957
010 _a0-931837-73-1
_bencadernado
_dEsc 3 310$
090 _a29957
100 _a20000919d1988 k||y0pory50 ba
101 0 _aeng
102 _aUS
200 1 _aSi02 and its interfaces
_esymposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.
_feditors S. T. Pantelides, G. Lucovsky
210 _aPittsburg, US
_cMaterials Research Society
_dcop. 1988
215 _aXVI, 329 p.
_cil.
_d24 cm
225 2 _aMaterials Research Society Symposium Proceedings
_v105
300 _aColocação: Sala azul/Piso 2. Bolsa de doutoramento, DCM
310 _aAdquirido DCM
606 _aMicroeletrónica
_xMateriais
606 _aSilício
680 _aTK7871.15
702 _aLucovsky
_bG.
_4340
_967988
702 _aPantelides
_bS. T.
_4340
_967989
801 _gRPC
_aPT
942 _2lcc
_cA
_n0