TY  - BOOK
AU  - Diogo
TI  - Rapid thermal processing and its effects on high aspect ratio silicon features
PY  - 2022///
CY  - Monte de Caparica
PB  - I. R. D.
KW  - Microeletrónica
KW  - Teses
KW  - Nanotecnologia
KW  - TK7874
UR  - https://run.unl.pt/handle/10362/152031
ER  -