Madou, Marc J.
Fundamentals of microfabrication and nanotechnology : manufacturing techniques for microfabrication and nanotechnology. - 3rd ed. - Boca Raton - London - New York : CRC , cop. 2012 . - XIII, 656 p. : il. ; 29 cm.
ISBN 978-1-4200-5519-1
Sistemas microeletromecânicos
Fundamentals of microfabrication and nanotechnology : manufacturing techniques for microfabrication and nanotechnology. - 3rd ed. - Boca Raton - London - New York : CRC , cop. 2012 . - XIII, 656 p. : il. ; 29 cm.
ISBN 978-1-4200-5519-1
Sistemas microeletromecânicos
