Campbell, Stephen A.
Fabrication engineering at the micro-and nanoscale / Stephen A. Campbell. - 3rd ed.. - New York, US [etc.] : Oxford University , 2008 . - XIV, 647 p. ; 25 cm. - (The Oxford Series in Electrical and Computer Engineering)
ISBN 978-0-19-532017-6
Semicondutores
LCC TK7871.85
Fabrication engineering at the micro-and nanoscale / Stephen A. Campbell. - 3rd ed.. - New York, US [etc.] : Oxford University , 2008 . - XIV, 647 p. ; 25 cm. - (The Oxford Series in Electrical and Computer Engineering)
ISBN 978-0-19-532017-6
Semicondutores
LCC TK7871.85