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Wolf, Stanley
Silicon processing for the VLSI era : vol. 3 : the submicron mosfet / Stanley Wolf. - Sunset Beach, California : Lattice Press , cop. 1995 . - XXII, 722 p. : il. ; 24 cm.

ISBN 0-9616721-5-3

Semicondutores
Circuitos integrados
Silício

LCC TK7874

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