Wolf, Stanley
Silicon processing for the VLSI era : vol. 1 : process technology / Stanley Wolf, Richard N. Tauber. - 2nd ed. - Sunset Beach, California : Lattice Press , cop. 2000 . - XXXVI, 890 p. : il. ; 24 cm.
ISBN 0-9616721-6-1
Semicondutores
Circuitos integrados
Silício
LCC TK7874
Silicon processing for the VLSI era : vol. 1 : process technology / Stanley Wolf, Richard N. Tauber. - 2nd ed. - Sunset Beach, California : Lattice Press , cop. 2000 . - XXXVI, 890 p. : il. ; 24 cm.
ISBN 0-9616721-6-1
Semicondutores
Circuitos integrados
Silício
LCC TK7874
