Campbell, Stephen A.
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York - Oxford : Oxford University Press , 2001 . - XIV, 603 p. : il. ; 24 cm.
ISBN 0-19-513605-5
Semicondutores
Semicondutores
LCC TK7871.85
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed. - New York - Oxford : Oxford University Press , 2001 . - XIV, 603 p. : il. ; 24 cm.
ISBN 0-19-513605-5
Semicondutores
Semicondutores
LCC TK7871.85
