Campbell, Stephen A.
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - New York - Oxford : Oxford University Press , 1996 . - XV, 536 p. : il. ; 24 cm.
ISBN 0-19-510508-7
Semicondutores
Semicondutores
LCC TK7871.85
The science and engineering of microelectronic fabrication / Stephen A. Campbell. - New York - Oxford : Oxford University Press , 1996 . - XV, 536 p. : il. ; 24 cm.
ISBN 0-19-510508-7
Semicondutores
Semicondutores
LCC TK7871.85
