Si02 and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A. / editors S. T. Pantelides, G. Lucovsky.
- Pittsburg, US : Materials Research Society , cop. 1988 .
- XVI, 329 p. : il. ; 24 cm.
- (Materials Research Society Symposium Proceedings)
; 105
ISBN 0-931837-73-1
Microeletrónica
Silício
LCC TK7871.15
ISBN 0-931837-73-1
Microeletrónica
Silício
LCC TK7871.15
